Inventor
OHTA SHINROU
JP12 patents
⚠️ This page may combine multiple inventors who share the name “OHTA SHINROU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
7 patentsUS7214122B2May 8, 2007
Substrate polishing apparatus
EBARA CORP19 citations92
US7547242B2Jun 16, 2009
Substrate polishing apparatus
EBARA CORP7 citations73
US7960188B2Jun 14, 2011
Polishing method
EBARA CORP3 citations62
US7780503B2Aug 24, 2010
Polishing apparatus and polishing method
EBARA CORP2 citations62
US7507144B2Mar 24, 2009
Substrate polishing apparatus
EBARA CORP3 citations62
US8585460B2Nov 19, 2013
Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method and apparatus for selecting wavelength of light for polishing endpoint detection, polishing endpoint detection method, polishing endpoint detection apparatus, and polishing monitoring method
EBARA CORP0 citations52
US8777694B2Jul 15, 2014
Polishing endpoint detection method
EBARA CORP0 citations51
KOBAYASHI YOICHI
2 patentsUS8388408B2Mar 5, 2013
Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method for selecting wavelength of light for polishing endpoint detection, and polishing endpoint detection method
KOBAYASHI YOICHI15 citations83
US8078419B2Dec 13, 2011
Polishing monitoring method and polishing apparatus
KOBAYASHI YOICHI8 citations83