Inventor
KOSHELEV KONSTANTIN NIKOLAEVITCH
RU8 patents
⚠️ This page may combine multiple inventors who share the name “KOSHELEV KONSTANTIN NIKOLAEVITCH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS7838853B2Nov 23, 2010
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7518134B2Apr 14, 2009
Plasma radiation source for a lithographic apparatus
ASML NETHERLANDS BV6 citations62
US7696493B2Apr 13, 2010
Radiation system and lithographic apparatus
ASML NETHERLANDS BV5 citations61
US7696492B2Apr 13, 2010
Radiation system and lithographic apparatus
ASML NETHERLANDS BV6 citations61
US8018574B2Sep 13, 2011
Lithographic apparatus, radiation system and device manufacturing method
ASML NETHERLANDS BV2 citations60
USRE41362EJun 1, 2010
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations60
US8362444B2Jan 29, 2013
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method
ASML NETHERLANDS BV1 citations51