P

Inventor

WALLACE ROBERT M

US51 patents
⚠️ This page may combine multiple inventors who share the name “WALLACE ROBERT M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEXAS INSTRUMENTS INC

40 patents
US6291866B1Sep 18, 2001

Zirconium and/or hafnium oxynitride gate dielectric

TEXAS INSTRUMENTS INC165 citations99
US6291867B1Sep 18, 2001

Zirconium and/or hafnium silicon-oxynitride gate dielectric

TEXAS INSTRUMENTS INC248 citations99
US6024801AFeb 15, 2000

Method of cleaning and treating a semiconductor device including a micromechanical device

TEXAS INSTRUMENTS INC179 citations99
US6020243AFeb 1, 2000

Zirconium and/or hafnium silicon-oxynitride gate dielectric

TEXAS INSTRUMENTS INC494 citations99
US6013553AJan 11, 2000

Zirconium and/or hafnium oxynitride gate dielectric

TEXAS INSTRUMENTS INC1,068 citations99
US5610438AMar 11, 1997

Micro-mechanical device with non-evaporable getter

TEXAS INSTRUMENTS INC539 citations99
US5606177AFeb 25, 1997

Silicon oxide resonant tunneling diode structure

TEXAS INSTRUMENTS INC248 citations99
US5523878AJun 4, 1996

Self-assembled monolayer coating for micro-mechanical devices

TEXAS INSTRUMENTS INC195 citations99
US5512374AApr 30, 1996

PFPE coatings for micro-mechanical devices

TEXAS INSTRUMENTS INC163 citations99
US5482564AJan 9, 1996

Method of unsticking components of micro-mechanical devices

TEXAS INSTRUMENTS INC168 citations99
US5316793AMay 31, 1994

Directed effusive beam atomic layer epitaxy system and method

TEXAS INSTRUMENTS INC165 citations99
US6624944B1Sep 23, 2003

Fluorinated coating for an optical element

TEXAS INSTRUMENTS INC141 citations98
US6150242ANov 21, 2000

Method of growing crystalline silicon overlayers on thin amorphous silicon oxide layers and forming by method a resonant tunneling diode

TEXAS INSTRUMENTS INC125 citations97
US5614785AMar 25, 1997

Anode plate for flat panel display having silicon getter

TEXAS INSTRUMENTS INC110 citations97
US6841439B1Jan 11, 2005

High permittivity silicate gate dielectric

TEXAS INSTRUMENTS INC52 citations96
US6552388B2Apr 22, 2003

Hafnium nitride gate dielectric

TEXAS INSTRUMENTS INC49 citations96
US5520563AMay 28, 1996

Method of making a field emission device anode plate having an integrated getter

TEXAS INSTRUMENTS INC51 citations96
US5453659ASep 26, 1995

Anode plate for flat panel display having integrated getter

TEXAS INSTRUMENTS INC89 citations96
US5689151ANov 18, 1997

Anode plate for flat panel display having integrated getter

TEXAS INSTRUMENTS INC66 citations95
US6784507B2Aug 31, 2004

Gate structure and method

TEXAS INSTRUMENTS INC19 citations93
US6436801B1Aug 20, 2002

Hafnium nitride gate dielectric

TEXAS INSTRUMENTS INC40 citations93
US6258637B1Jul 10, 2001

Method for thin film deposition on single-crystal semiconductor substrates

TEXAS INSTRUMENTS INC40 citations93
US6245606B1Jun 12, 2001

Low temperature method for forming a thin, uniform layer of aluminum oxide

TEXAS INSTRUMENTS INC21 citations93
US6020247AFeb 1, 2000

Method for thin film deposition on single-crystal semiconductor substrates

TEXAS INSTRUMENTS INC22 citations93
US5352330AOct 4, 1994

Process for producing nanometer-size structures on surfaces using electron beam induced chemistry through electron stimulated desorption

TEXAS INSTRUMENTS INC33 citations93
US6335238B1Jan 1, 2002

Integrated dielectric and method

TEXAS INSTRUMENTS INC32 citations92
US6277681B1Aug 21, 2001

Process to produce ultrathin crystalline silicon nitride on Si(111) for advanced gate dielectrics

TEXAS INSTRUMENTS INC18 citations92
US4567432AJan 28, 1986

Apparatus for testing integrated circuits

TEXAS INSTRUMENTS INC172 citations92
US6140243AOct 31, 2000

Low temperature process for post-etch defluoridation of metals

TEXAS INSTRUMENTS INC39 citations91
US7115461B2Oct 3, 2006

High permittivity silicate gate dielectric

TEXAS INSTRUMENTS INC13 citations84
US6071751AJun 6, 2000

Deuterium sintering with rapid quenching

TEXAS INSTRUMENTS INC17 citations84
US6420729B2Jul 16, 2002

Process to produce ultrathin crystalline silicon nitride on Si (111) for advanced gate dielectrics

TEXAS INSTRUMENTS INC6 citations74
US6274510B1Aug 14, 2001

Lower temperature method for forming high quality silicon-nitrogen dielectrics

TEXAS INSTRUMENTS INC6 citations73
US6143634ANov 7, 2000

Semiconductor process with deuterium predominance at high temperature

TEXAS INSTRUMENTS INC12 citations73
US6040230AMar 21, 2000

Method of forming a nano-rugged silicon-containing layer

TEXAS INSTRUMENTS INC7 citations73
US7030038B1Apr 18, 2006

Low temperature method for forming a thin, uniform oxide

TEXAS INSTRUMENTS INC2 citations63
US6897105B1May 24, 2005

Method of forming metal oxide gate structures and capacitor electrodes

TEXAS INSTRUMENTS INC5 citations62
US6613698B2Sep 2, 2003

Lower temperature method for forming high quality silicon-nitrogen dielectrics

TEXAS INSTRUMENTS INC3 citations62
US6468856B2Oct 22, 2002

High charge storage density integrated circuit capacitor

TEXAS INSTRUMENTS INC3 citations60
US6730977B2May 4, 2004

Lower temperature method for forming high quality silicon-nitrogen dielectrics

TEXAS INSTRUMENTS INC0 citations52

(unassigned)

2 patents

SAMSUNG ELECTRONICS CO LTD

2 patents

UNIV NORTH TEXAS

2 patents

UNIV TEXAS

1 patent

COLOMBO LUIGI

1 patent

TEXAS INSTR CORPORATED

1 patent

BORGWARNER INC

1 patent

Showing the top 50 of 51 patents by PatentIndex Score.