Inventor
SHAH VINAY K
US14 patents
⚠️ This page may combine multiple inventors who share the name “SHAH VINAY K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHAH VINAY K
6 patentsUS8318512B2Nov 27, 2012
Automated substrate handling and film quality inspection in solar cell processing
SHAH VINAY K67 citations95
US8689812B2Apr 8, 2014
Methods and loadport for purging a substrate carrier
SHAH VINAY K18 citations92
US8672121B2Mar 18, 2014
Methods and apparatus for transporting substrate carriers
SHAH VINAY K7 citations83
US8601975B2Dec 10, 2013
Methods and loadport apparatus for purging a substrate carrier
SHAH VINAY K11 citations83
US8074597B2Dec 13, 2011
Methods and apparatus for purging a substrate carrier
SHAH VINAY K12 citations81
US8886354B2Nov 11, 2014
Methods, systems and apparatus for rapid exchange of work material
SHAH VINAY K0 citations51
APPLIED MATERIALS INC
4 patentsUS7833351B2Nov 16, 2010
Batch processing platform for ALD and CVD
APPLIED MATERIALS INC12 citations82
US7984543B2Jul 26, 2011
Methods for moving a substrate carrier
APPLIED MATERIALS INC2 citations63
US8356968B2Jan 22, 2013
Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transfer
APPLIED MATERIALS INC3 citations62
US8379082B2Feb 19, 2013
System, methods and apparatus for substrate carrier content verification using a material handling system
APPLIED MATERIALS INC0 citations51