Inventor

DAUGHERTY JOHN

US50 patents

⚠️ This page may combine multiple inventors who share the name “DAUGHERTY JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAUGHERTY JOHN

LAM RES CORP

Method and process of implementing machine learning in complex multivariate wafer processing equipment

Microwave plasma processor

Methods and apparatus for optimizing the delivery of a set of gases in a plasma processing system

Methods and apparatus for tuning a set of plasma processing steps

System implementing machine learning in complex multivariate wafer processing equipment

Pump baffle and screen to improve etch uniformity

Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs

Dense oxide coated component of a plasma processing chamber and method of manufacture thereof

Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus

Conditioning chamber component

Wafer transport assembly with integrated buffers

Dense oxide coated component of a plasma processing chamber and method of manufacture thereof

Method of reducing aluminum fluoride deposits in plasma etch reactor

Systems for removing and replacing consumable parts from a semiconductor process module in situ

Corrosion resistant aluminum coating on plasma chamber components

Method for inspecting electrostatic chucks with Kelvin probe analysis

Method and apparatus for tuning a set of plasma processing steps

Method to selectively pattern a surface for plasma resistant coat applications

Conditioning chamber component

Laminated aerosol deposition coating for aluminum components for plasma processing chambers

Conditioning chamber component

Wafer transport assembly with integrated buffers

Method for conditioning semiconductor processing chamber components

Chamber component cleanliness measurement system

Single crystal metal oxide plasma chamber component

Electrode for plasma processing chamber

Method of wet cleaning aluminum chamber parts

Wafer transport assembly with integrated buffers

Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs

Method and apparatus for measuring particles

Method for conditioning silicon part

Monolithic ceramic component of gas delivery system and method of making and use thereof

Load lock interface and integrated post-processing module

Portable sonic particle removal tool with a chemically controlled working fluid

System and method for cleaning gas injectors

SHIH HONG

Extending lifetime of yttrium oxide as a plasma chamber material

Extending lifetime of yttrium oxide as a plasma chamber material

Method of cleaning aluminum plasma chamber parts

Method for performing hot water seal on electrostatic chuck

GEN MILLS INC

Portable food container cover with detachable utensil

Portable food container cover with detachable utensil

Thermal annealing of plastic pieces

AVOYAN ARMEN

Mixed acid cleaning assemblies

Methods for mixed acid cleaning of showerhead electrodes

Dielectric window cleaning apparatuses

DAUGHERTY JOHN

Security latch assembly

Rotatable game board

GOOGLE LLC

Antenna switch diversity circuitry

CORMIER JOSH

Automated bubble detection apparatus and method

BROWN DANNY

Vacuum sealing radio frequency (RF) and low frequency conducting actuator