Inventor
LARSON DEAN J
US16 patents
⚠️ This page may combine multiple inventors who share the name “LARSON DEAN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS7169231B2Jan 30, 2007
Gas distribution system with tuning gas
LAM RES CORP47 citations95
US7939778B2May 10, 2011
Plasma processing chamber with guard ring for upper electrode assembly
LAM RES CORP27 citations92
US7875824B2Jan 25, 2011
Quartz guard ring centering features
LAM RES CORP16 citations92
US7482550B2Jan 27, 2009
Quartz guard ring
LAM RES CORP18 citations92
US7371332B2May 13, 2008
Uniform etch system
LAM RES CORP29 citations92
US8772171B2Jul 8, 2014
Gas switching section including valves having different flow coefficients for gas distribution system
LAM RES CORP5 citations83
US9234775B2Jan 12, 2016
Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber
LAM RES CORP6 citations72
US9484243B2Nov 1, 2016
Processing chamber with features from side wall
LAM RES CORP2 citations59
US9028646B2May 12, 2015
Film adhesive for semiconductor vacuum processing apparatus
LAM RES CORP0 citations51
LARSON DEAN J
6 patentsUS8313611B2Nov 20, 2012
Gas switching section including valves having different flow coefficients for gas distribution system
LARSON DEAN J20 citations91
US8088248B2Jan 3, 2012
Gas switching section including valves having different flow coefficients for gas distribution system
LARSON DEAN J30 citations91
US8449786B2May 28, 2013
Film adhesive for semiconductor vacuum processing apparatus
LARSON DEAN J15 citations83
US8084705B2Dec 27, 2011
Quartz guard ring centering features
LARSON DEAN J6 citations73
US9151408B2Oct 6, 2015
Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architecture
LARSON DEAN J2 citations53
US8801892B2Aug 12, 2014
Uniform etch system
LARSON DEAN J1 citations51