Inventor
RAMANATHAN SIVAKAMI
US11 patents
⚠️ This page may combine multiple inventors who share the name “RAMANATHAN SIVAKAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6821909B2Nov 23, 2004
Post rinse to improve selective deposition of electroless cobalt on copper for ULSI application
APPLIED MATERIALS INC62 citations96
US6905622B2Jun 14, 2005
Electroless deposition method
APPLIED MATERIALS INC32 citations92
US6899816B2May 31, 2005
Electroless deposition method
APPLIED MATERIALS INC24 citations92
US6824666B2Nov 30, 2004
Electroless deposition method over sub-micron apertures
APPLIED MATERIALS INC42 citations91
US6878245B2Apr 12, 2005
Method and apparatus for reducing organic depletion during non-processing time periods
APPLIED MATERIALS INC12 citations83
US6797620B2Sep 28, 2004
Method and apparatus for improved electroplating fill of an aperture
APPLIED MATERIALS INC12 citations73
LAM RES CORP
4 patentsUS9123651B2Sep 1, 2015
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
LAM RES CORP6 citations82
US9546432B2Jan 17, 2017
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
LAM RES CORP3 citations71
US9337002B2May 10, 2016
Corrosion resistant aluminum coating on plasma chamber components
LAM RES CORP6 citations69
US9387521B2Jul 12, 2016
Method of wet cleaning aluminum chamber parts
LAM RES CORP0 citations51