Inventor

MULGREW PAUL

US2 patents

⚠️ This page may combine multiple inventors who share the name “MULGREW PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US7052553B1May 30, 2006

Wet cleaning of electrostatic chucks

LAM RES CORP174 citations97

SHIH HONG

1 patent

US8545639B2Oct 1, 2013

Method of cleaning aluminum plasma chamber parts

SHIH HONG1 citations51