Inventor

BARTRAY PETRUS R

NL2 patents

⚠️ This page may combine multiple inventors who share the name “BARTRAY PETRUS R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PHILIPS CORP

1 patent

US5204712AApr 20, 1993

Support device with a tiltable object table, and optical lithographic device provided with such a support device

PHILIPS CORP68 citations92

AUER-JONGEPIER SUZAN L

1 patent

US8636458B2Jan 28, 2014

Integrated post-exposure bake track

AUER-JONGEPIER SUZAN L2 citations48