Inventor

LUTTIKHUIS BERNARDUS A J

NL2 patents

⚠️ This page may combine multiple inventors who share the name “LUTTIKHUIS BERNARDUS A J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US6542220B1Apr 1, 2003

Purge gas systems for use in lithographic projection apparatus

ASML NETHERLANDS BV92 citations92

AUER-JONGEPIER SUZAN L

1 patent

US8636458B2Jan 28, 2014

Integrated post-exposure bake track

AUER-JONGEPIER SUZAN L2 citations48