Inventor

PLUG REINDER T

NL2 patents

⚠️ This page may combine multiple inventors who share the name “PLUG REINDER T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US6420716B1Jul 16, 2002

Servo control method and its application in a lithographic apparatus

ASML NETHERLANDS BV25 citations82

AUER-JONGEPIER SUZAN L

1 patent

US8636458B2Jan 28, 2014

Integrated post-exposure bake track

AUER-JONGEPIER SUZAN L2 citations48