Inventor

SEGERS HUBERT M

NL3 patents

⚠️ This page may combine multiple inventors who share the name “SEGERS HUBERT M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US6721035B1Apr 13, 2004

Lithographic projection apparatus

ASML NETHERLANDS BV48 citations91

US6404483B1Jun 11, 2002

Substrate handler for use in lithographic projection apparatus

ASML NETHERLANDS BV31 citations87

AUER-JONGEPIER SUZAN L

1 patent

US8636458B2Jan 28, 2014

Integrated post-exposure bake track

AUER-JONGEPIER SUZAN L2 citations48