Inventor
CHAO KUO-HUNG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “CHAO KUO-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS9123583B2Sep 1, 2015
Overlay abnormality gating by Z data
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US9826615B2Nov 21, 2017
EUV collector with orientation to avoid contamination
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US9466101B2Oct 11, 2016
Detection of defects on wafer during semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations65
US9228827B2Jan 5, 2016
Flexible wafer leveling design for various orientation of line/trench
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40