Inventor
SHAREEF IQBAL
US17 patents
⚠️ This page may combine multiple inventors who share the name “SHAREEF IQBAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS10128087B2Nov 13, 2018
Configuration independent gas delivery system
LAM RES CORP8 citations83
US9090972B2Jul 28, 2015
Gas supply systems for substrate processing chambers and methods therefor
LAM RES CORP6 citations82
US9335768B2May 10, 2016
Cluster mass flow devices and multi-line mass flow devices incorporating the same
LAM RES CORP4 citations72
US9778083B2Oct 3, 2017
Metrology method for transient gas flow
LAM RES CORP2 citations71
US9721763B2Aug 1, 2017
Systems and methods for providing gases to a process chamber
LAM RES CORP2 citations71
US10431431B2Oct 1, 2019
Gas supply delivery arrangement including a gas splitter for tunable gas flow control
LAM RES CORP6 citations68
US7981307B2Jul 19, 2011
Method and apparatus for shaping gas profile near bevel edge
LAM RES CORP0 citations52
US9704761B2Jul 11, 2017
Corrosion sensor retainer assembly apparatus and method for detecting corrosion
LAM RES CORP0 citations48
US10760944B2Sep 1, 2020
Hybrid flow metrology for improved chamber matching
LAM RES CORP0 citations45
US9580360B2Feb 28, 2017
Monolithic ceramic component of gas delivery system and method of making and use thereof
LAM RES CORP1 citations45
SHAREEF IQBAL
3 patentsUS8794267B2Aug 5, 2014
Gas transport delay resolution for short etch recipes
SHAREEF IQBAL17 citations79
US10002747B2Jun 19, 2018
Methods and apparatus for supplying process gas in a plasma processing system
SHAREEF IQBAL2 citations70
US9091397B2Jul 28, 2015
Shared gas panels in plasma processing chambers employing multi-zone gas feeds
SHAREEF IQBAL5 citations70