Inventor

ZEMLOCK ANTHONY

US2 patents

Patents

2 patents

US10431431B2Oct 1, 2019

Gas supply delivery arrangement including a gas splitter for tunable gas flow control

LAM RES CORP6 citations68

US9704761B2Jul 11, 2017

Corrosion sensor retainer assembly apparatus and method for detecting corrosion

LAM RES CORP0 citations48