Inventor
ORIMOTO SHINJI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “ORIMOTO SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS11532784B2Dec 20, 2022
Substrate processing apparatus and method
TOKYO ELECTRON LTD3 citations69
US12394656B2Aug 19, 2025
Mounting table and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US10254693B2Apr 9, 2019
Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member
TOKYO ELECTRON LTD1 citations60
US11605547B2Mar 14, 2023
Temperature measuring mechanism, temperature measuring method, and stage device
TOKYO ELECTRON LTD0 citations59
US11417504B2Aug 16, 2022
Stage device and processing apparatus
TOKYO ELECTRON LTD1 citations59
US11293092B2Apr 5, 2022
Stage device and processing apparatus
TOKYO ELECTRON LTD0 citations50
US11414747B2Aug 16, 2022
Sputtering device
TOKYO ELECTRON LTD0 citations49
US12392026B2Aug 19, 2025
Method and device for substrate processing
TOKYO ELECTRON LTD0 citations47
US9787222B2Oct 10, 2017
Electrostatic attraction apparatus, electrostatic chuck and cooling treatment apparatus
TOKYO ELECTRON LTD0 citations40