Inventor
HANAMACHI TOSHIHIKO
JP20 patents
⚠️ This page may combine multiple inventors who share the name “HANAMACHI TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NHK SPRING CO LTD
15 patentsUS6687113B2Feb 3, 2004
Electrostatic chuck
NHK SPRING CO LTD19 citations92
US6376808B2Apr 23, 2002
Heating apparatus
NHK SPRING CO LTD41 citations92
US7372001B2May 13, 2008
Ceramics heater
NHK SPRING CO LTD31 citations90
US7241346B2Jul 10, 2007
Apparatus for vapor deposition
NHK SPRING CO LTD16 citations83
US11477858B2Oct 18, 2022
Sheath heater
NHK SPRING CO LTD2 citations68
US12247296B2Mar 11, 2025
Member for plasma processing device
NHK SPRING CO LTD1 citations55
US12338852B2Jun 24, 2025
Joined body
NHK SPRING CO LTD0 citations49
US10290529B2May 14, 2019
Heater unit
NHK SPRING CO LTD0 citations49
US12284731B2Apr 22, 2025
Heater and stage having the heater
NHK SPRING CO LTD0 citations47
US12211710B2Jan 28, 2025
Stage, film-forming apparatus, and film-processing apparatus
NHK SPRING CO LTD0 citations47
US11201040B2Dec 14, 2021
Substrate supporting unit and film forming device having the substrate supporting unit
NHK SPRING CO LTD0 citations47
US12598949B2Apr 7, 2026
Stage and method of manufacturing stage
NHK SPRING CO LTD0 citations45
US11490464B2Nov 1, 2022
Heater unit
NHK SPRING CO LTD0 citations44
US9551071B2Jan 24, 2017
Substrate support device
NHK SPRING CO LTD0 citations38
US10276410B2Apr 30, 2019
Substrate support device
NHK SPRING CO LTD0 citations36