Inventor
GOLOVANEVSKY BORIS
IL15 patents
⚠️ This page may combine multiple inventors who share the name “GOLOVANEVSKY BORIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
7 patentsUS7242477B2Jul 10, 2007
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP124 citations98
US7298481B2Nov 20, 2007
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP46 citations96
US7933016B2Apr 26, 2011
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP15 citations92
US7804994B2Sep 28, 2010
Overlay metrology and control method
KLA TENCOR TECH CORP54 citations92
US7663753B2Feb 16, 2010
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP19 citations92
US7277172B2Oct 2, 2007
Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals
KLA TENCOR TECH CORP34 citations92
US7616313B2Nov 10, 2009
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP17 citations84
KLA TENCOR CORP
6 patentsUS9581430B2Feb 28, 2017
Phase characterization of targets
KLA TENCOR CORP15 citations82
US9546946B2Jan 17, 2017
Metrology target indentification, design and verification
KLA TENCOR CORP2 citations73
US10897566B2Jan 19, 2021
Direct focusing with image binning in metrology tools
KLA TENCOR CORP3 citations67
US10755016B2Aug 25, 2020
Hot spot and process window monitoring
KLA TENCOR CORP0 citations51
US10354035B2Jul 16, 2019
Hot spot and process window monitoring
KLA TENCOR CORP0 citations51
US9970886B2May 15, 2018
Metrology tool stage configurations and operation methods
KLA TENCOR CORP0 citations41