Inventor
HADA KEIKO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “HADA KEIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS6617095B2Sep 9, 2003
Evaluating method of hydrophobic process, forming method of resist pattern, and forming system of resist pattern
TOKYO ELECTRON LTD21 citations91
US10903083B2Jan 26, 2021
Substrate processing method, substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD2 citations71
US12237173B2Feb 25, 2025
Substrate processing method, substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD0 citations61
US11557493B2Jan 17, 2023
Substrate cleaning apparatus and substrate cleaning method
TOKYO ELECTRON LTD0 citations50
US11548804B2Jan 10, 2023
Method and apparatus for processing oxygen-containing workpiece
TOKYO ELECTRON LTD0 citations47
US10213076B2Feb 26, 2019
Particle collecting apparatus and particle collecting method
TOKYO ELECTRON LTD0 citations40