Inventor
NAGAKURA KOICHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “NAGAKURA KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS10903083B2Jan 26, 2021
Substrate processing method, substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD2 citations71
US10192774B2Jan 29, 2019
Temperature control device for processing target object and method of selectively etching nitride film from multilayer film
TOKYO ELECTRON LTD2 citations71
US11024514B2Jun 1, 2021
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations62
US12237173B2Feb 25, 2025
Substrate processing method, substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD0 citations61
US10910229B2Feb 2, 2021
Substrate treatment method
TOKYO ELECTRON LTD0 citations60