Inventor
WANG YANQIN
CN10 patents
⚠️ This page may combine multiple inventors who share the name “WANG YANQIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INST OPTICS & ELECTRONICS CAS
6 patentsUS12174322B2Dec 24, 2024
F-P sensor probe, absolute distance measurement device, and absolute distance measurement method
INST OPTICS & ELECTRONICS CAS0 citations52
US12272530B2Apr 8, 2025
Ultra-large area scanning reactive ion etching machine and etching method thereof
INST OPTICS & ELECTRONICS CAS0 citations50
US11061330B2Jul 13, 2021
Methods and apparatuses for coating photoresist
INST OPTICS & ELECTRONICS CAS0 citations50
US12078937B1Sep 3, 2024
Near-field lithography immersion system, immersion unit and interface module thereof
INST OPTICS & ELECTRONICS CAS0 citations48
US11693320B2Jul 4, 2023
Secondary imaging optical lithography method and apparatus
INST OPTICS & ELECTRONICS CAS0 citations48
US12547081B2Feb 10, 2026
Illumination compensation method
INST OPTICS & ELECTRONICS CAS0 citations47