Inventor
ZHAO ZEYU
CN14 patents
⚠️ This page may combine multiple inventors who share the name “ZHAO ZEYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INST OPTICS & ELECTRONICS CAS
10 patentsUS12085741B2Sep 10, 2024
Method for preparing super-resolution lens based on metal-dielectric strip array, and using method of super-resolution lens
INST OPTICS & ELECTRONICS CAS1 citations60
US11724962B2Aug 15, 2023
Method for etching curved substrate
INST OPTICS & ELECTRONICS CAS0 citations60
US12092960B2Sep 17, 2024
Mask topology optimization method and system for surface plasmon near-field photolithography
INST OPTICS & ELECTRONICS CAS0 citations59
US12505266B2Dec 23, 2025
High-order rotational symmetry unit-based nonlinear geometric phase metasurface
INST OPTICS & ELECTRONICS CAS0 citations51
US12272530B2Apr 8, 2025
Ultra-large area scanning reactive ion etching machine and etching method thereof
INST OPTICS & ELECTRONICS CAS0 citations50
US11061330B2Jul 13, 2021
Methods and apparatuses for coating photoresist
INST OPTICS & ELECTRONICS CAS0 citations50
US12181794B2Dec 31, 2024
Photolithography method
INST OPTICS & ELECTRONICS CAS0 citations48
US12078937B1Sep 3, 2024
Near-field lithography immersion system, immersion unit and interface module thereof
INST OPTICS & ELECTRONICS CAS0 citations48
US11693320B2Jul 4, 2023
Secondary imaging optical lithography method and apparatus
INST OPTICS & ELECTRONICS CAS0 citations48
US12547081B2Feb 10, 2026
Illumination compensation method
INST OPTICS & ELECTRONICS CAS0 citations47