Inventor
PU MINGBO
CN14 patents
⚠️ This page may combine multiple inventors who share the name “PU MINGBO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INST OPTICS & ELECTRONICS CAS
13 patentsUS11714358B2Aug 1, 2023
Intelligent correction device control system for super-resolution lithography precision mask
INST OPTICS & ELECTRONICS CAS0 citations62
US12306424B2May 20, 2025
Metasurface-based imaging system, design method, and detector
INST OPTICS & ELECTRONICS CAS0 citations61
US11675273B2Jun 13, 2023
Method of fabricating micro-nano structure
INST OPTICS & ELECTRONICS CAS0 citations61
US11724962B2Aug 15, 2023
Method for etching curved substrate
INST OPTICS & ELECTRONICS CAS0 citations60
US12092960B2Sep 17, 2024
Mask topology optimization method and system for surface plasmon near-field photolithography
INST OPTICS & ELECTRONICS CAS0 citations59
US12505266B2Dec 23, 2025
High-order rotational symmetry unit-based nonlinear geometric phase metasurface
INST OPTICS & ELECTRONICS CAS0 citations51
US12228710B1Feb 18, 2025
Ultra-wide angle broadband polarization imaging system based on metasurface, and detection apparatus
INST OPTICS & ELECTRONICS CAS0 citations51
US11868055B2Jan 9, 2024
Multifunctional lithography device
INST OPTICS & ELECTRONICS CAS0 citations51
US12272530B2Apr 8, 2025
Ultra-large area scanning reactive ion etching machine and etching method thereof
INST OPTICS & ELECTRONICS CAS0 citations50
US11754352B2Sep 12, 2023
Visible light-transparent and radiative-cooling multilayer film
INST OPTICS & ELECTRONICS CAS0 citations50
US11061330B2Jul 13, 2021
Methods and apparatuses for coating photoresist
INST OPTICS & ELECTRONICS CAS0 citations50
US12078937B1Sep 3, 2024
Near-field lithography immersion system, immersion unit and interface module thereof
INST OPTICS & ELECTRONICS CAS0 citations48
US11592602B2Feb 28, 2023
Sub-wavelength structural material having patch type array and compatibility of low detectability for infrared, laser, and microwave
INST OPTICS & ELECTRONICS CAS0 citations47