Inventor
ZAITSU MASARU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “ZAITSU MASARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
11 patentsUS10283353B2May 7, 2019
Method of reforming insulating film deposited on substrate with recess pattern
ASM IP HOLDING BV416 citations99
US9793135B1Oct 17, 2017
Method of cyclic dry etching using etchant film
ASM IP HOLDING BV475 citations99
US9627221B1Apr 18, 2017
Continuous process incorporating atomic layer etching
ASM IP HOLDING BV507 citations99
US9455138B1Sep 27, 2016
Method for forming dielectric film in trenches by PEALD using H-containing gas
ASM IP HOLDING BV587 citations99
US10435790B2Oct 8, 2019
Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
ASM IP HOLDING BV397 citations98
US9735024B2Aug 15, 2017
Method of atomic layer etching using functional group-containing fluorocarbon
ASM IP HOLDING BV489 citations98
US10504742B2Dec 10, 2019
Method of atomic layer etching using hydrogen plasma
ASM IP HOLDING BV9 citations84
US9818601B1Nov 14, 2017
Substrate processing apparatus and method of processing substrate
ASM IP HOLDING BV12 citations82
US10847365B2Nov 24, 2020
Method of forming conformal silicon carbide film by cyclic CVD
ASM IP HOLDING BV4 citations73
US11127589B2Sep 21, 2021
Method of topology-selective film formation of silicon oxide
ASM IP HOLDING BV1 citations62
US11637011B2Apr 25, 2023
Method of topology-selective film formation of silicon oxide
ASM IP HOLDING BV1 citations60