Inventor

CHEN NORMAN

TW22 patents

⚠️ This page may combine multiple inventors who share the name “CHEN NORMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN NORMAN

GLOBALFOUNDRIES INC

Power rail layout for dense standard cell library

Methodology for post-integration awareness in optical proximity correction

Use of polarization and composite illumination source for advanced optical lithography

Methods for retargeting circuit design layouts and for fabricating semiconductor devices using retargeted layouts

Retargeting semiconductor device shapes for multiple patterning processes

Retargeting semiconductor device shapes for multiple patterning processes

Device resulting from printing minimum width semiconductor features at non-minimum pitch

Printing minimum width semiconductor features at non-minimum pitch and resulting device

Method for fabricating a semiconductor integrated circuit with a litho-etch, litho-etch process for etching trenches

Generating risk inventory and common process window for adjustment of manufacturing tool

TAIWAN SEMICONDUCTOR MFG CO LTD

Mask cleaning

Mask cleaning

Mask cleaning

Mask cleaning

Method providing for asymmetric pupil configuration for an extreme ultraviolet lithography process

TAIWAN SEMICONDUCTOR MFG

Utilization of electric field with isotropic development in photolithography

Semiconductor device having in-chip critical dimension and focus patterns

Top patterned hardmask and method for patterning

Methodology for implementing enhanced optical lithography for hole patterning in semiconductor fabrication

LIU GEORGE

Methodology for implementing enhanced optical lithography for hole patterning in semiconductor fabrication

Contrast enhancing exposure system and method for use in semiconductor fabrication

UNITED MICROELECTRONICS CORP

Immersion lithography process and mask layer structure applied in the same