P

Inventor

KIM JUNG YUP

KR26 patents
⚠️ This page may combine multiple inventors who share the name “KIM JUNG YUP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

10 patents
US6626968B2Sep 30, 2003

Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD53 citations96
US6248667B1Jun 19, 2001

Chemical mechanical polishing method using double polishing stop layer

SAMSUNG ELECTRONICS CO LTD62 citations96
US7196010B2Mar 27, 2007

Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD16 citations84
US6585570B2Jul 1, 2003

Method and apparatus for supplying chemical-mechanical polishing slurries

SAMSUNG ELECTRONICS CO LTD15 citations83
US6537914B1Mar 25, 2003

Integrated circuit device isolation methods using high selectivity chemical-mechanical polishing

SAMSUNG ELECTRONICS CO LTD12 citations73
US6548388B2Apr 15, 2003

Semiconductor device including gate electrode having damascene structure and method of fabricating the same

SAMSUNG ELECTRONICS CO LTD9 citations72
US6716732B2Apr 6, 2004

Method for fabricating a contact pad of semiconductor device

SAMSUNG ELECTRONICS CO LTD5 citations62
US6498102B2Dec 24, 2002

Method for planarizing a semiconductor device using ceria-based slurry

SAMSUNG ELECTRONICS CO LTD2 citations62
US6518157B2Feb 11, 2003

Methods of planarizing insulating layers on regions having different etching rates

SAMSUNG ELECTRONICS CO LTD3 citations57
US6723644B2Apr 20, 2004

Method of fabricating a semiconductor device using two chemical mechanical polishing processes to polish regions having different conductive pattern densities

SAMSUNG ELECTRONICS CO LTD0 citations42

KIM JUNG-YUP

4 patents

KOREA INST MACH & MATERIALS

4 patents

KOREA MACH & MATERIALS INST

2 patents

KOREA INST OCEAN SCI & TECH

1 patent

KOREA JOONGANG HAK WONCO LTD

1 patent

UNIV CHUNG ANG IND ACAD COOP FOUND

1 patent

KIM HYEONG SIC

1 patent

CHANG SUNG HWAN

1 patent

LEE HAK JOO

1 patent