P

Inventor

KASA KENTARO

JP11 patents
⚠️ This page may combine multiple inventors who share the name “KASA KENTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA MEMORY CORP

4 patents
US9952505B2Apr 24, 2018

Imprint device and pattern forming method

TOSHIBA MEMORY CORP1 citations51
US10955753B2Mar 23, 2021

Substrate processing control apparatus, recording medium, and method of manufacturing photomask

TOSHIBA MEMORY CORP0 citations48
US10325857B2Jun 18, 2019

Semiconductor device manufacturing method and semiconductor wafer

TOSHIBA MEMORY CORP0 citations38
US9941177B2Apr 10, 2018

Pattern accuracy detecting apparatus and processing system

TOSHIBA MEMORY CORP0 citations37

KIOXIA CORP

3 patents
US12449736B2Oct 21, 2025

Measurement apparatus and measurement method

KIOXIA CORP0 citations51
US12510830B2Dec 30, 2025

Measuring device and measuring method

KIOXIA CORP0 citations48
US11841331B2Dec 12, 2023

Measuring and calculating apparatus and measuring and calculating program

KIOXIA CORP0 citations48

KASA KENTARO

2 patents
US8085393B2Dec 27, 2011

Exposure apparatus inspection method and method for manufacturing semiconductor device

KASA KENTARO2 citations57
US9188879B2Nov 17, 2015

Substrate holding apparatus, pattern transfer apparatus, and pattern transfer method

KASA KENTARO0 citations46

TOSHIBA KK

2 patents
US8878129B1Nov 4, 2014

Pattern measurement apparatus and pattern measurement method

TOSHIBA KK0 citations38
US8953163B2Feb 10, 2015

Exposure apparatus, exposure method, and method of manufacturing semiconductor device

TOSHIBA KK0 citations36