Inventor

KANG XIAOXU

CN19 patents

⚠️ This page may combine multiple inventors who share the name “KANG XIAOXU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KANG XIAOXU

SHANGHAI IC R&D CT CO LTD

MEMS microphone structure and method of manufacturing the same

Capacitive silicon microphone and fabrication method thereof

Infrared detector having vertical sidewall sensitive layer and manufacturing method thereof

Manufacturing method for image sensor structure

Infrared sensor structure

Infrared pixel structure, manufacturing method thereof and hybrid image device

CMOS imaging sensor structure and manufacturing method therefor

Recessed structure capable of being conveniently monitored online and preparation method thereof

Method for forming intermetallic air gap

Infrared detector pixel structure and manufacturing method thereof

Ion implantation system

Apparatus and method for improving film thickness uniformity

Infrared detector pixel structure and manufactureing method thereof

KANG XIAOXU

Pixel structure of CMOS image sensor and manufacturing method thereof

MOS transistor for reducing short-channel effects and its production

ZHAO YUHANG

Method for fabricating a carbon nanotube interconnection structure

Copper interconnect structure and method for manufacturing the same

SHANGHAI IC R & D CENTER CO LTD

Image sensor structure and manufacturing method thereof

ZUO QINGYUN

Metal film resistor structure and manufacturing method