Inventor
ARELLANO NOEL
US10 patents
Patents
10 patentsUS10374034B1Aug 6, 2019
Undercut control in isotropic wet etch processes
IBM5 citations72
US9879152B2Jan 30, 2018
Block copolymers for directed self-assembly applications
IBM2 citations72
US11171054B2Nov 9, 2021
Selective deposition with SAM for fully aligned via
IBM3 citations70
US12588261B2Mar 24, 2026
Selective deposition on metals using porous low-k materials
IBM0 citations62
US10692755B2Jun 23, 2020
Selective deposition of dielectrics on ultra-low k dielectrics
IBM1 citations62
US11882770B2Jan 23, 2024
Area-selective deposition of metal nitride to fabricate devices
IBM1 citations61
US11187983B2Nov 30, 2021
EUV patterning of monolayers for selective atomic layer deposition
IBM0 citations58
US12488994B2Dec 2, 2025
Magnesium oxide based hardmask for reactive ion etching
IBM0 citations51
US12588436B2Mar 24, 2026
Area selective deposition of hardmasks for vacuum gap formation
IBM0 citations50
US9982097B2May 29, 2018
Thin film self assembly of topcoat-free silicon-containing diblock copolymers
IBM0 citations41