Inventor
JOYNER KEITH A
US26 patents
Patents
26 patentsUS6737347B1May 18, 2004
Semiconductor device with fully self-aligned local interconnects, and method for fabricating the device
TEXAS INSTRUMENTS INC214 citations99
US6376285B1Apr 23, 2002
Annealed porous silicon with epitaxial layer for SOI
TEXAS INSTRUMENTS INC84 citations98
US6806151B2Oct 19, 2004
Methods and apparatus for inducing stress in a semiconductor device
TEXAS INSTRUMENTS INC74 citations97
US6118161ASep 12, 2000
Self-aligned trenched-channel lateral-current-flow transistor
TEXAS INSTRUMENTS INC43 citations96
US5364800ANov 15, 1994
Varying the thickness of the surface silicon layer in a silicon-on-insulator substrate
TEXAS INSTRUMENTS INC83 citations96
US5909628AJun 1, 1999
Reducing non-uniformity in a refill layer thickness for a semiconductor device
TEXAS INSTRUMENTS INC54 citations94
US6207511B1Mar 27, 2001
Self-aligned trenched-channel lateral-current-flow transistor
TEXAS INSTRUMENTS INC24 citations93
US6114741ASep 5, 2000
Trench isolation of a CMOS structure
TEXAS INSTRUMENTS INC29 citations93
US6376859B1Apr 23, 2002
Variable porosity porous silicon isolation
TEXAS INSTRUMENTS INC40 citations92
US6228747B1May 8, 2001
Organic sidewall spacers used with resist
TEXAS INSTRUMENTS INC36 citations92
US6214699B1Apr 10, 2001
Method for forming an isolation structure in a substrate
TEXAS INSTRUMENTS INC35 citations92
US6004871ADec 21, 1999
Implant enhancement of titanium silicidation
TEXAS INSTRUMENTS INC38 citations92
US5548149AAug 20, 1996
Varying the thickness of the surface silicon layer in a silicon-on-insulator substrate
TEXAS INSTRUMENTS INC30 citations92
US4507851AApr 2, 1985
Process for forming an electrical interconnection system on a semiconductor
TEXAS INSTRUMENTS INC28 citations91
US5882981AMar 16, 1999
Mesa isolation Refill Process for Silicon on Insulator Technology Using Flowage Oxides as the Refill Material
TEXAS INSTRUMENTS INC49 citations90
US5429955AJul 4, 1995
Method for constructing semiconductor-on-insulator
TEXAS INSTRUMENTS INC41 citations88
US6057214AMay 2, 2000
Silicon-on-insulation trench isolation structure and method for forming
TEXAS INSTRUMENTS INC16 citations84
US6767777B2Jul 27, 2004
Method for manufacturing and structure for transistors with reduced gate to contact spacing including etching to thin the spacers
TEXAS INSTRUMENTS INC12 citations74
US6180491B1Jan 30, 2001
Isolation structure and method
TEXAS INSTRUMENTS INC6 citations74
US5982006ANov 9, 1999
Active silicon-on-insulator region having a buried insulation layer with tapered edge
TEXAS INSTRUMENTS INC11 citations74
US5352341AOct 4, 1994
Reducing leakage current in silicon-on-insulator substrates
TEXAS INSTRUMENTS INC7 citations74
US5440132AAug 8, 1995
Systems and methods for controlling the temperature and uniformity of a wafer during a SIMOX implantation process
TEXAS INSTRUMENTS INC13 citations67
US7101772B2Sep 5, 2006
Means for forming SOI
TEXAS INSTRUMENTS INC6 citations63
US7459734B2Dec 2, 2008
Method for manufacturing and structure for transistors with reduced gate to contact spacing
TEXAS INSTRUMENTS INC0 citations52
US7339214B2Mar 4, 2008
Methods and apparatus for inducing stress in a semiconductor device
TEXAS INSTRUMENTS INC0 citations52
US6171969B1Jan 9, 2001
Uniform dopant distribution for mesas of semiconductors
TEXAS INSTRUMENTS INC0 citations52