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Inventor
KALYANARAMAN PALAIYUR
US
2 patents
Patents
2 patents
US4869994A
Sep 26, 1989
Photoresist compositions based on hydroxystyrene copolymers
HOECHST CELANESE CORP
6 citations
68
US4824758A
Apr 25, 1989
Photoresist compositions based on acetoxystyrene copolymers
HOECHST CELANESE CORP
2 citations
57