Inventor

BALUJA SANJEEV

US107 patents

⚠️ This page may combine multiple inventors who share the name “BALUJA SANJEEV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BALUJA SANJEEV

APPLIED MATERIALS INC

Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors

Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors

Ultraviolet reflector with coolant gas holes and method

Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections

Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation

High efficiency UV curing system

Method for UV based silylation chamber clean

Substrate edge grip apparatus

Gas distribution plate

Pedestal heater for spatial multi-wafer processing tool

Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films

Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric film

Gas mixer

Thermally uniform deposition station

Showerhead assembly with multiple fluid delivery zones

Gas distribution plate for thermal deposition

Apparatus and method for UV treatment, chemical treatment, and deposition

Showerhead assembly with multiple fluid delivery zones

Substrate temperature measurement in multi-zone heater

Gas distribution plate

Gas distribution plate

Gas distribution plate with high aspect ratio holes and a high hole density

Complementary pattern station designs

Method for cleaning a process chamber

Application of bottom purge to increase clean efficiency

Heater assembly with purge gap control and temperature uniformity for batch processing chambers

Pedestal support design for precise chamber matching and process control

Method and system for high temperature clean

Method and hardware for cleaning UV chambers

Method and hardware for cleaning UV chambers

Gas-pulsing-based shared precursor distribution system and methods of use

System and method for substrate processing chambers

Dithering or dynamic offsets for improved uniformity

Dithering or dynamic offsets for improved uniformity

Apparatus and methods for motor shaft and heater leveling

Paired dynamic parallel plate capacitively coupled plasmas

Single wafer processing environments with spatial separation

Clean isolation valve for reduced dead volume

Apparatus and methods for improving chemical utilization rate in deposition process

Pedestal heater for spatial multi-wafer processing tool

Gas distribution plate for thermal deposition

Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity

Process kit for a high throughput processing chamber

BALUJA SANJEEV

Quartz showerhead for nanocure UV chamber

Method and apparatus for modulating wafer treatment profile in UV chamber

YANG YAO-HUNG

Ultraviolet reflector with coolant gas holes and method

KASZUBA ANDRZEI

Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors

ROCHA-ALVAREZ JUAN CARLOS

Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation

YAP LIPYEOW

Multifunctional heater/chiller pedestal for wide range wafer temperature control

REILLY PATRICK

Deposition of an amorphous carbon layer with high film density and high etch selectivity