P

Inventor

CHAN KELVIN

US99 patents
⚠️ This page may combine multiple inventors who share the name “CHAN KELVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

34 patents
US7297376B1Nov 20, 2007

Method to reduce gas-phase reactions in a PECVD process with silicon and organic precursors to deposit defect-free initial layers

APPLIED MATERIALS INC33 citations90
US10886172B2Jan 5, 2021

Methods for wordline separation in 3D-NAND devices

APPLIED MATERIALS INC8 citations84
US10622251B2Apr 14, 2020

Methods for wordline separation in 3D-NAND devices

APPLIED MATERIALS INC8 citations84
US10410869B2Sep 10, 2019

CVD based oxide-metal multi structure for 3D NAND memory devices

APPLIED MATERIALS INC8 citations84
US10354916B2Jul 16, 2019

Methods for wordline separation in 3D-NAND devices

APPLIED MATERIALS INC12 citations84
US9123532B2Sep 1, 2015

Low-k dielectric damage repair by vapor-phase chemical exposure

APPLIED MATERIALS INC5 citations84
US9105695B2Aug 11, 2015

Cobalt selectivity improvement in selective cobalt process sequence

APPLIED MATERIALS INC6 citations84
US7410916B2Aug 12, 2008

Method of improving initiation layer for low-k dielectric film by digital liquid flow meter

APPLIED MATERIALS INC9 citations84
US9508545B2Nov 29, 2016

Selectively lateral growth of silicon oxide thin film

APPLIED MATERIALS INC6 citations83
US11174551B2Nov 16, 2021

Methods for depositing tungsten on halosilane based metal silicide nucleation layers

APPLIED MATERIALS INC2 citations73
US9978685B2May 22, 2018

Conformal amorphous silicon as nucleation layer for W ALD process

APPLIED MATERIALS INC4 citations73
US9058980B1Jun 16, 2015

UV-assisted photochemical vapor deposition for damaged low K films pore sealing

APPLIED MATERIALS INC5 citations73
US8993444B2Mar 31, 2015

Method to reduce dielectric constant of a porous low-k film

APPLIED MATERIALS INC5 citations73
US9741558B2Aug 22, 2017

Selectively lateral growth of silicon oxide thin film

APPLIED MATERIALS INC3 citations72
US12368024B2Jul 22, 2025

Methods and apparatus for processing a substrate

APPLIED MATERIALS INC2 citations71
US11459652B2Oct 4, 2022

Techniques and device structures based upon directional dielectric deposition and bottom-up fill

APPLIED MATERIALS INC2 citations71
US9659765B2May 23, 2017

Enhancement of modulus and hardness for UV-cured ultra low-k dielectric films

APPLIED MATERIALS INC3 citations71
US9506145B2Nov 29, 2016

Method and hardware for cleaning UV chambers

APPLIED MATERIALS INC3 citations71
US9364871B2Jun 14, 2016

Method and hardware for cleaning UV chambers

APPLIED MATERIALS INC4 citations71
US11749564B2Sep 5, 2023

Techniques for void-free material depositions

APPLIED MATERIALS INC2 citations70
US11702742B2Jul 18, 2023

Methods of forming nucleation layers with halogenated silanes

APPLIED MATERIALS INC0 citations63
US7947611B2May 24, 2011

Method of improving initiation layer for low-k dielectric film by digital liquid flow meter

APPLIED MATERIALS INC2 citations63
US12394670B2Aug 19, 2025

Nucleation-free gap fill ALD process

APPLIED MATERIALS INC0 citations62
US12094707B2Sep 17, 2024

Plasma enhanced CVD with periodic high voltage bias

APPLIED MATERIALS INC0 citations62
US11887856B2Jan 30, 2024

Enhanced spatial ALD of metals through controlled precursor mixing

APPLIED MATERIALS INC0 citations62
US11817320B2Nov 14, 2023

CVD based oxide-metal multi structure for 3D NAND memory devices

APPLIED MATERIALS INC0 citations62
US11776805B2Oct 3, 2023

Selective oxidation and simplified pre-clean

APPLIED MATERIALS INC0 citations62
US11621160B2Apr 4, 2023

Doped and undoped vanadium oxides for low-k spacer applications

APPLIED MATERIALS INC0 citations62
US11289374B2Mar 29, 2022

Nucleation-free gap fill ALD process

APPLIED MATERIALS INC1 citations62
US11094544B2Aug 17, 2021

Methods of forming self-aligned vias

APPLIED MATERIALS INC0 citations62
US11094533B2Aug 17, 2021

Doped and undoped vanadium oxides for low-k spacer applications

APPLIED MATERIALS INC0 citations62
US11043386B2Jun 22, 2021

Enhanced spatial ALD of metals through controlled precursor mixing

APPLIED MATERIALS INC1 citations62
US9478460B2Oct 25, 2016

Cobalt selectivity improvement in selective cobalt process sequence

APPLIED MATERIALS INC2 citations62
US12228534B2Feb 18, 2025

Capacitive sensor for monitoring gas concentration

APPLIED MATERIALS INC0 citations61

CISCO TECH INC

7 patents

CHAN KELVIN

4 patents

GOOGLE LLC

2 patents

XIE BO

1 patent

MASSACHUSETTS INST TECHNOLOGY

1 patent

DING YIYANG JOY

1 patent

Showing the top 50 of 99 patents by PatentIndex Score.