Inventor
CHHABRA MAHENDRA
US4 patents
Patents
4 patentsUS8753449B2Jun 17, 2014
Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric film
APPLIED MATERIALS INC9 citations82
US9659765B2May 23, 2017
Enhancement of modulus and hardness for UV-cured ultra low-k dielectric films
APPLIED MATERIALS INC3 citations71
US9506145B2Nov 29, 2016
Method and hardware for cleaning UV chambers
APPLIED MATERIALS INC3 citations71
US9364871B2Jun 14, 2016
Method and hardware for cleaning UV chambers
APPLIED MATERIALS INC4 citations71