Inventor

NOWAK THOMAS

US63 patents

⚠️ This page may combine multiple inventors who share the name “NOWAK THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOWAK THOMAS

APPLIED MATERIALS INC

Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors

Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas

PECVD process

Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors

Dilute remote plasma clean

Tunable ground planes in plasma chambers

Method and apparatus for optical detection of effluent composition

PECVD process

PECVD process

Ultraviolet reflector with coolant gas holes and method

Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections

Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation

High efficiency UV curing system

Blocker plate bypass to distribute gases in a chemical vapor deposition system

Heated gas box for PECVD applications

PECVD process

PECVD process

Reduction of hillocks prior to dielectric barrier deposition in Cu damascene

Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber

Microwave plasma generating apparatus with improved heat protection of sealing O-rings

PECVD process

Apparatus and method for UV treatment, chemical treatment, and deposition

Monitoring system for deposition and method of operation thereof

Reduction of hillocks prior to dielectric barrier deposition in Cu damascene

Method and hardware for cleaning UV chambers

Method and hardware for cleaning UV chambers

Enhanced remote plasma cleaning

Method and system for supplying a cleaning gas into a process chamber

PECVD process

Dual temperature heater

PECVD apparatus and process

Method and system for supplying a cleaning gas into a process chamber

Increased tool utilization/reduction in MWBC for UV curing chamber

RAJAGOPALAN NAGARAJAN

Silicon nitride passivation layer for covering high aspect ratio features

Fabrication of through-silicon vias on silicon wafers

Fabrication of through-silicon vias on silicon wafers

AVENTIS BEHRING GMBH

Removal of viruses from protein solutions by ultrafiltration

Process for the inactivation of viruses

BALUJA SANJEEV

Quartz showerhead for nanocure UV chamber

XIE BO

UV assisted silylation for recovery and pore sealing of damaged low K films

YANG YAO-HUNG

Ultraviolet reflector with coolant gas holes and method

KASZUBA ANDRZEI

Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors

SHAH ASHISH

Systems for plasma enhanced chemical vapor deposition and bevel edge etching

ROCHA-ALVAREZ JUAN CARLOS

Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation

SPEEDLINE TECHNOLOGIES INC

Conveyorized vacuum injection system

CORONADO ENGINEERING INC

Portable batch blending system

YAP LIPYEOW

Multifunctional heater/chiller pedestal for wide range wafer temperature control

YIM KANG SUB

Dielectric recovery of plasma damaged low-k films by UV-assisted photochemical deposition

REILLY PATRICK

Deposition of an amorphous carbon layer with high film density and high etch selectivity

SANKARAKRISHNAN RAMPRAKASH

Confined process volume PECVD chamber