Inventor
YAO DAPING
US15 patents
⚠️ This page may combine multiple inventors who share the name “YAO DAPING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS9460959B1Oct 4, 2016
Methods for pre-cleaning conductive interconnect structures
APPLIED MATERIALS INC113 citations97
US10600685B2Mar 24, 2020
Methods to fill high aspect ratio features on semiconductor substrates with MOCVD cobalt film
APPLIED MATERIALS INC2 citations72
US9506145B2Nov 29, 2016
Method and hardware for cleaning UV chambers
APPLIED MATERIALS INC3 citations71
US9364871B2Jun 14, 2016
Method and hardware for cleaning UV chambers
APPLIED MATERIALS INC4 citations71
US11628456B2Apr 18, 2023
Apparatus for increasing flux from an ampoule
APPLIED MATERIALS INC0 citations62
US11133155B2Sep 28, 2021
Apparatus for depositing metal films with plasma treatment
APPLIED MATERIALS INC0 citations62
US11059061B2Jul 13, 2021
Apparatus for increasing flux from an ampoule
APPLIED MATERIALS INC0 citations62
US10752990B2Aug 25, 2020
Apparatus and methods to remove residual precursor inside gas lines post-deposition
APPLIED MATERIALS INC1 citations62
US10640870B2May 5, 2020
Gas feedthrough assembly
APPLIED MATERIALS INC0 citations51
US10453657B2Oct 22, 2019
Apparatus for depositing metal films with plasma treatment
APPLIED MATERIALS INC0 citations51
US10283345B2May 7, 2019
Methods for pre-cleaning conductive materials on a substrate
APPLIED MATERIALS INC0 citations51
YAO DAPING
3 patentsUS8664126B2Mar 4, 2014
Selective deposition of polymer films on bare silicon instead of oxide surface
YAO DAPING2 citations58
US9478437B2Oct 25, 2016
Methods for repairing low-k dielectrics using carbon plasma immersion
YAO DAPING0 citations48
US8492177B2Jul 23, 2013
Methods for quantitative measurement of a plasma immersion process
YAO DAPING0 citations48