Inventor
RAJ DAEMIAN
US10 patents
Patents
10 patentsUS7829145B2Nov 9, 2010
Methods of uniformity control for low flow process and chamber to chamber matching
APPLIED MATERIALS INC18 citations92
US7622005B2Nov 24, 2009
Uniformity control for low flow process and chamber to chamber matching
APPLIED MATERIALS INC19 citations92
US7572337B2Aug 11, 2009
Blocker plate bypass to distribute gases in a chemical vapor deposition system
APPLIED MATERIALS INC43 citations92
US10428426B2Oct 1, 2019
Method and apparatus to prevent deposition rate/thickness drift, reduce particle defects and increase remote plasma system lifetime
APPLIED MATERIALS INC9 citations83
US7189658B2Mar 13, 2007
Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile
APPLIED MATERIALS INC11 citations82
US9506145B2Nov 29, 2016
Method and hardware for cleaning UV chambers
APPLIED MATERIALS INC3 citations71
US9364871B2Jun 14, 2016
Method and hardware for cleaning UV chambers
APPLIED MATERIALS INC4 citations71
US7273823B2Sep 25, 2007
Situ oxide cap layer development
APPLIED MATERIALS INC3 citations62
US10934620B2Mar 2, 2021
Integration of dual remote plasmas sources for flowable CVD
APPLIED MATERIALS INC0 citations51
US8349746B2Jan 8, 2013
Microelectronic structure including a low k dielectric and a method of controlling carbon distribution in the structure
APPLIED MATERIALS INC0 citations40