Inventor
ODA MICHIAKI
JP15 patents
Patents
15 patentsUS5855232AJan 5, 1999
Automatic metering/supplying apparatus for granular substances
SHINETSU HANDOTAI KK65 citations92
US5900055AMay 4, 1999
Method of manufacturing silicon monocrystal by continuously charged Czochralski method
SHINETSU HANDOTAI KK32 citations91
US5902395AMay 11, 1999
Method for feeding granular silicon material, feed pipe used in the method, and method of manufacturing a silicon monocrystal
SHINETSU HANDOTAI KK30 citations90
US5106593AApr 21, 1992
Apparatus for producing czochralski-grown single crystals
SHINETSU HANDOTAI KK26 citations88
US5876496AMar 2, 1999
Method for feeding a granular raw material and feeding apparatus
SHINETSU HANDOTAI KK18 citations82
US5868835AFeb 9, 1999
Apparatus for recharging of silicon granules in a czochralski single crystal growing operation
SHINETSU HANDOTAI KK16 citations80
US5419277AMay 30, 1995
Method and apparatus for producing a Czochralski growth semiconductor single-crystal
SHINETSU HANDOTAI KK14 citations73
US5330729AJul 19, 1994
Single crystal pulling apparatus
SHINETSU HANDOTAI KK15 citations73
US5089239AFeb 18, 1992
Wire vibration prevention mechanism for a single crystal pulling apparatus
SHINETSU HANDOTAI KK9 citations73
US5020775AJun 4, 1991
Isolation valve used in a single crystal pulling apparatus
SHINETSU HANDOTAI KK15 citations73
US5733368AMar 31, 1998
Method of manufacturing silicon monocrystal using continuous czochralski method
SHINETSU HANDOTAI KK14 citations72
US5690733ANov 25, 1997
Method for recharging of silicon granules in a Czochralski single crystal growing operation
SHINETSU HANDOTAI KK11 citations72
US5885365AMar 23, 1999
Cleaning method of crucible
SHINETSU HANDOTAI KK14 citations66
US5254319AOct 19, 1993
Single crystal pulling apparatus
SHINETSU HANDOTAI KK6 citations62
US6159283ADec 12, 2000
Apparatus and method for measuring mechanical strength of neck portion of seed crystal and method for producing silicon single crystal
SHINETSU HANDOTAI KK2 citations57