Inventor
RUCKEL RAYMOND R
US9 patents
Patents
9 patentsUS5191506AMar 2, 1993
Ceramic electrostatic chuck
IBM144 citations98
US5155652AOct 13, 1992
Temperature cycling ceramic electrostatic chuck
IBM144 citations97
US5055964AOct 8, 1991
Electrostatic chuck having tapered electrodes
IBM120 citations97
US5535507AJul 16, 1996
Method of making electrostatic chuck with oxide insulator
IBM47 citations92
US5521790AMay 28, 1996
Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization
IBM53 citations92
US5154333AOct 13, 1992
Jaw cleaving device
IBM38 citations92
US5099571AMar 31, 1992
Method for fabricating a split-ring electrostatic chuck
IBM44 citations92
US4869876ASep 26, 1989
Multi-purpose plural-oven gas chromatography system with shared controls
IBM52 citations85
US4476734AOct 16, 1984
Wet needle sampler for use with a gas chromatograph
IBM15 citations68