Inventor
WESTERFIELD JR ROBERT P
US16 patents
Patents
16 patentsUS5191506AMar 2, 1993
Ceramic electrostatic chuck
IBM144 citations98
US5155652AOct 13, 1992
Temperature cycling ceramic electrostatic chuck
IBM144 citations97
US5055964AOct 8, 1991
Electrostatic chuck having tapered electrodes
IBM120 citations97
US5561585AOct 1, 1996
Electrostatic chuck with reference electrode
IBM74 citations96
US5463525AOct 31, 1995
Guard ring electrostatic chuck
IBM101 citations96
US6389940B1May 21, 2002
Gang punch tool assembly
IBM17 citations92
US6314852B1Nov 13, 2001
Gang punch tool assembly
IBM22 citations92
US6251251B1Jun 26, 2001
Anode design for semiconductor deposition
IBM35 citations92
US6223636B1May 1, 2001
Low-cost high-density gang punch
IBM21 citations92
US5535507AJul 16, 1996
Method of making electrostatic chuck with oxide insulator
IBM47 citations92
US5521790AMay 28, 1996
Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization
IBM53 citations92
US5467249ANov 14, 1995
Electrostatic chuck with reference electrode
IBM28 citations92
US5452510ASep 26, 1995
Method of making an electrostatic chuck with oxide insulator
IBM34 citations92
US5099571AMar 31, 1992
Method for fabricating a split-ring electrostatic chuck
IBM44 citations92
US7118385B1Oct 10, 2006
Apparatus for implementing a self-centering land grid array socket
IBM29 citations90
US5612851AMar 18, 1997
Guard ring electrostatic chuck
IBM15 citations82