Inventor
LUCAS PAUL D
US12 patents
⚠️ This page may combine multiple inventors who share the name “LUCAS PAUL D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
11 patentsUS5804717ASep 8, 1998
Mass flow transducer having extended flow rate measurement range
MKS INSTR INC56 citations95
US6568274B1May 27, 2003
Capacitive based pressure sensor design
MKS INSTR INC104 citations93
US6776394B2Aug 17, 2004
Pendulum valve assembly
MKS INSTR INC47 citations91
US5824894AOct 20, 1998
Mass flowmeter and laminar flow elements for use therein
MKS INSTR INC32 citations88
US6863256B2Mar 8, 2005
Seal ring for pendulum valve assembly
MKS INSTR INC14 citations83
US7278444B2Oct 9, 2007
Valve assembly having improved pump-down performance
MKS INSTR INC11 citations79
US9133960B2Sep 15, 2015
Fluid control valves
MKS INSTR INC7 citations78
US8887575B2Nov 18, 2014
Pressure sensor
MKS INSTR INC2 citations60
US7032882B2Apr 25, 2006
Valve assembly having novel flow characteristics
MKS INSTR INC5 citations54
US11287342B2Mar 29, 2022
Capacitance manometer with improved baffle for improved detection accuracy
MKS INSTR INC0 citations52
US9562820B2Feb 7, 2017
Pressure sensor with real time health monitoring and compensation
MKS INSTR INC1 citations49