Inventor
KUMAGAE AKITOSHI
JP10 patents
Patents
10 patentsUS5969428AOct 19, 1999
Alignment mark, manufacturing method thereof, exposing method using the alignment mark, semiconductor device manufactured using the exposing method
TOSHIBA KK43 citations96
US5847468ADec 8, 1998
Alignment mark for use in making semiconductor devices
TOSHIBA KK43 citations96
US5326675AJul 5, 1994
Pattern forming method including the formation of an acidic coating layer on the radiation-sensitive layer
TOSHIBA KK49 citations96
US6333493B1Dec 25, 2001
Heat treating method and heat treating apparatus
TOSHIBA KK20 citations92
US6265696B1Jul 24, 2001
Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surface
TOSHIBA KK21 citations92
USRE35821EJun 9, 1998
Pattern forming method including the formation of an acidic coating layer on the radiation-sensitive layer
TOSHIBA KK23 citations92
US6483083B2Nov 19, 2002
Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surface
TOSHIBA KK7 citations74
US5169740ADec 8, 1992
Positive type and negative type ionization irradiation sensitive and/or deep u.v. sensitive resists comprising a halogenated resin binder
TOSHIBA KK13 citations73
US6680462B2Jan 20, 2004
Heat treating method and heat treating apparatus
TOSHIBA KK4 citations63
US6495807B2Dec 17, 2002
Heat treating method and heat treating apparatus
TOSHIBA KK3 citations63