Inventor
SCHILLING UWE
DE7 patents
⚠️ This page may combine multiple inventors who share the name “SCHILLING UWE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
4 patentsUS6716678B2Apr 6, 2004
Method for producing an antifuse and antifuse for the selective electrical connection of adjacent conductive regions
INFINEON TECHNOLOGIES AG4 citations60
US6624042B2Sep 23, 2003
Fabrication process for a semiconductor component
INFINEON TECHNOLOGIES AG2 citations59
US6821863B2Nov 23, 2004
Method for producing a cavity in a monocrystalline silicon substrate and a semiconductor component having a cavity in a monocrystalline silicon substrate with an epitaxial covering layer
INFINEON TECHNOLOGIES AG2 citations58
US6380074B1Apr 30, 2002
Deposition of various base layers for selective layer growth in semiconductor production
INFINEON TECHNOLOGIES AG0 citations48