Inventor

ZARRIN HOSSEIN

US3 patents

⚠️ This page may combine multiple inventors who share the name “ZARRIN HOSSEIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

2 patents

US6783630B2Aug 31, 2004

Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling

AXCELIS TECH INC22 citations91

US7166187B2Jan 23, 2007

Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling

AXCELIS TECH INC12 citations82

LUTZ CARL DAVID

1 patent

US9540259B2Jan 10, 2017

Apparatus for producing and delivering ozonated water

LUTZ CARL DAVID5 citations61