Inventor
ZABKA MICHAEL C
US12 patents
⚠️ This page may combine multiple inventors who share the name “ZABKA MICHAEL C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
8 patentsUS6520338B2Feb 18, 2003
Wafer carrier having a low tolerance build-up
ENTEGRIS INC27 citations91
US7059475B2Jun 13, 2006
System for cushioning wafer in wafer carrier
ENTEGRIS INC29 citations85
US6945405B1Sep 20, 2005
Transport module with latching door
ENTEGRIS INC15 citations82
US11610795B2Mar 21, 2023
Membrane diffuser for a substrate container
ENTEGRIS INC4 citations72
US11901205B2Feb 13, 2024
Membrane diffuser for a substrate container
ENTEGRIS INC2 citations70
US11581209B2Feb 14, 2023
Environmental control material holder
ENTEGRIS INC4 citations66
US12593647B2Mar 31, 2026
Remote optimization of purge flow rates in a container
ENTEGRIS INC0 citations53
US12312127B2May 27, 2025
Process carrier
ENTEGRIS INC0 citations52