Inventor
TAKESHITA KENJI
JP44 patents
⚠️ This page may combine multiple inventors who share the name “TAKESHITA KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
14 patentsUS6461974B1Oct 8, 2002
High temperature tungsten etching process
LAM RES CORP226 citations98
US7169231B2Jan 30, 2007
Gas distribution system with tuning gas
LAM RES CORP47 citations95
US7371332B2May 13, 2008
Uniform etch system
LAM RES CORP29 citations92
US6709547B1Mar 23, 2004
Moveable barrier for multiple etch processes
LAM RES CORP50 citations92
US6514378B1Feb 4, 2003
Method for improving uniformity and reducing etch rate variation of etching polysilicon
LAM RES CORP36 citations92
US7892445B1Feb 22, 2011
Wafer electrical discharge control using argon free dechucking gas
LAM RES CORP23 citations90
US7081407B2Jul 25, 2006
Method of preventing damage to porous low-k materials during resist stripping
LAM RES CORP11 citations83
US6531029B1Mar 11, 2003
Vacuum plasma processor apparatus and method
LAM RES CORP15 citations83
US7517801B1Apr 14, 2009
Method for selectivity control in a plasma processing system
LAM RES CORP7 citations74
US7090782B1Aug 15, 2006
Etch with uniformity control
LAM RES CORP8 citations74
US7534363B2May 19, 2009
Method for providing uniform removal of organic material
LAM RES CORP3 citations60
US7521362B2Apr 21, 2009
Methods for the optimization of ion energy control in a plasma processing system
LAM RES CORP1 citations51
US6897156B2May 24, 2005
Vacuum plasma processor method
LAM RES CORP1 citations51
US7226869B2Jun 5, 2007
Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
LAM RES CORP1 citations46
MINOLTA CO LTD
12 patentsUS5808775ASep 15, 1998
Laser beam scanning optical apparatus
MINOLTA CO LTD108 citations97
US6400488B1Jun 4, 2002
Light beam scanner
MINOLTA CO LTD25 citations92
US6323955B1Nov 27, 2001
Image forming apparatus
MINOLTA CO LTD21 citations92
US6313906B1Nov 6, 2001
Multibeam scanning device
MINOLTA CO LTD21 citations92
US6157478ADec 5, 2000
Multibeam scanning optical apparatus and laser light source apparatus
MINOLTA CO LTD25 citations92
US6038353AMar 14, 2000
Light beam scanning optical apparatus
MINOLTA CO LTD16 citations83
US6097421AAug 1, 2000
Scanning optical system
MINOLTA CO LTD11 citations74
US6341030B1Jan 22, 2002
Light beam optical scanner and image forming apparatus
MINOLTA CO LTD7 citations73
US6088146AJul 11, 2000
Scanning optical system and a scanning optical apparatus
MINOLTA CO LTD14 citations73
US5856669AJan 5, 1999
Laser beam scanning optical apparatus having means for generating moire fringes
MINOLTA CO LTD9 citations72
US5499045AMar 12, 1996
Image forming apparatus with optical element support structure
MINOLTA CO LTD5 citations62
US6710905B2Mar 23, 2004
Tandem scanning optical device
MINOLTA CO LTD2 citations57
APPLIED MATERIALS INC
4 patentsUS11495470B1Nov 8, 2022
Method of enhancing etching selectivity using a pulsed plasma
APPLIED MATERIALS INC2 citations68
US12315732B2May 27, 2025
Method and apparatus for etching a semiconductor substrate in a plasma etch chamber
APPLIED MATERIALS INC0 citations62
US12278110B2Apr 15, 2025
Bias voltage modulation approach for SiO/SiN layer alternating etch process
APPLIED MATERIALS INC0 citations53
US9443716B2Sep 13, 2016
Precise critical dimension control using bilayer ALD
APPLIED MATERIALS INC1 citations45
TAKESHITA KENJI
3 patentsUS8222155B2Jul 17, 2012
Selectivity control in a plasma processing system
TAKESHITA KENJI2 citations59
US8259763B2Sep 4, 2012
Laser gain medium and laser oscillator using the same
TAKESHITA KENJI2 citations56
US8068523B2Nov 29, 2011
Laser gain medium and laser oscillator using the same
TAKESHITA KENJI2 citations56
MINOLTA CAMERA KK
2 patentsUS5561743AOct 1, 1996
Digital method image forming apparatus and image forming method thereof
MINOLTA CAMERA KK20 citations92
US5450211ASep 12, 1995
Image forming apparatus and method for maintaining set magnification not withstanding changes in optical system due to temperature change
MINOLTA CAMERA KK23 citations92