Inventor
SAWADA MAHITO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “SAWADA MAHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RENESAS TECH CORP
4 patentsUS7154184B2Dec 26, 2006
Interconnection structure of semiconductor device
RENESAS TECH CORP9 citations72
US7012336B2Mar 14, 2006
Semiconductor device with a fluorinated silicate glass film as an interlayer metal dielectric film, and manufacturing method thereof
RENESAS TECH CORP4 citations62
US7489040B2Feb 10, 2009
Interconnection structure of semiconductor device
RENESAS TECH CORP0 citations50
US6759317B2Jul 6, 2004
Method of manufacturing semiconductor device having passivation film and buffer coating film
RENESAS TECH CORP1 citations50
MITSUBISHI ELECTRIC CORP
3 patentsUS6579787B2Jun 17, 2003
Semiconductor device with a fluorinated silicate glass film as an interlayer metal dielectric film, and manufacturing method thereof
MITSUBISHI ELECTRIC CORP29 citations92
US6213852B1Apr 10, 2001
Polishing apparatus and method of manufacturing a semiconductor device using the same
MITSUBISHI ELECTRIC CORP20 citations88
US6645859B1Nov 11, 2003
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP11 citations72
RENESAS ELECTRONICS CORP
3 patentsUS8384187B2Feb 26, 2013
Semiconductor device with shallow trench isolation
RENESAS ELECTRONICS CORP6 citations83
US7875539B2Jan 25, 2011
Semiconductor device
RENESAS ELECTRONICS CORP3 citations61
US9029237B2May 12, 2015
Semiconductor device and method of manufacturing the same
RENESAS ELECTRONICS CORP0 citations51