Inventor
POAG FRANK D
US3 patents
Patents
3 patentsUS6197123B1Mar 6, 2001
Method for cleaning a process chamber used for manufacturing substrates during nonproduction intervals
TEXAS INSTRUMENTS INC56 citations94
US5958517ASep 28, 1999
System and method for cleaning nozzle delivering spin-on-glass to substrate
TEXAS INSTRUMENTS INC17 citations79
US6442867B2Sep 3, 2002
Apparatus and method for cleaning a vertical furnace pedestal and cap
TEXAS INSTRUMENTS INC13 citations67