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Inventor
YAGI TAKEHITO
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “YAGI TAKEHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ISHIKAWAJIMA HARIMA HEAVY IND
2 patents
US6894839B2
May 17, 2005
Illumination optical system and laser processor having the same
ISHIKAWAJIMA HARIMA HEAVY IND
33 citations
91
US6890839B2
May 10, 2005
Method and apparatus for laser annealing configurations of a beam
ISHIKAWAJIMA HARIMA HEAVY IND
13 citations
82
TAKIMOTO HIDETOSHI
1 patent
US8093913B2
Jan 10, 2012
Film thickness measurement device and method
TAKIMOTO HIDETOSHI
8 citations
72
SEMICONDUCTOR ENERGY LAB
1 patent
US6621636B2
Sep 16, 2003
Laser irradiation apparatus and method of laser irradiation
SEMICONDUCTOR ENERGY LAB
12 citations
72