Inventor
OMOTO YUTAKA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “OMOTO YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS4631106ADec 23, 1986
Plasma processor
HITACHI LTD99 citations94
US6624084B2Sep 23, 2003
Plasma processing equipment and plasma processing method using the same
HITACHI LTD47 citations92
US4943361AJul 24, 1990
Plasma treating method and apparatus therefor
HITACHI LTD23 citations92
US6156663ADec 5, 2000
Method and apparatus for plasma processing
HITACHI LTD16 citations82